Circular SAW Resonators: Influence of Sensitive Element Dimensions on Strength Characteristics and First Experimental Samples
Sergey Yu. Shevchenko, Denis A. Mikhailenko, Alexander S. Kukaev, Vladimir Yu. Venediktov
TL;DR
This paper explores how the size of sensitive elements in circular SAW resonators affects their strength and performance, with potential applications in accelerometers for automotive and industrial use.
Contribution
The study introduces a new analysis of the relationship between sensitive element dimensions and measurable acceleration in SAW resonators.
Findings
The dimensions of sensitive elements significantly influence the measurable acceleration range.
Experimental samples validated the simulation results for potential micromechanical accelerometer applications.
The design shows promise for use in automotive g-sensors and high-overload industrial monitoring.
Abstract
In preceding research endeavors, the frequency characteristics of a ring resonator on surface acoustic waves made of various materials were studied. Investigations encompassed fixation techniques within the housing, the impact of external variables on these components, and the most efficient configuration of the interdigital transducer within the ring resonator to curtail bandwidth. This current study is dedicated to investigating the correlation between sensitivity and the highest measurable acceleration concerning the dimensions of these sensitive elements. Furthermore, it involves assessing the attributes of produced experimental samples to verify the simulation results. The results obtained represent the possibility of creating a micromechanical accelerometer that can be used in the automotive industry as a g-sensor shock, as well as in industries where the numerical value of high…
Genes, proteins, chemicals, diseases, species, mutations and cell lines named across the full text — each resolved to its canonical identifier and authoritative record.
Click any figure to enlarge with its caption.
Figure 1
Figure 2
Figure 3
Figure 4
Figure 5
Figure 6
Figure 7
Figure 8
Figure 9
Figure 10
Figure 11
Figure 12
Figure 13
Figure 14
Figure 15
Figure 16Peer Reviews
No public reviews on file for this paper yet. If you reviewed it on a platform where reviews are public (OpenReview, ICLR, NeurIPS, ICML), you can paste yours below so the community can read it here.
Videos
No videos yet. Explain this paper in a talk, walkthrough, or lecture? Add one.
Taxonomy
TopicsAcoustic Wave Resonator Technologies · Mechanical and Optical Resonators · Advanced MEMS and NEMS Technologies