# Circular SAW Resonators: Influence of Sensitive Element Dimensions on Strength Characteristics and First Experimental Samples

## TL;DR

This paper explores how the size of sensitive elements in circular SAW resonators affects their strength and performance, with potential applications in accelerometers for automotive and industrial use.

## Contribution

The study introduces a new analysis of the relationship between sensitive element dimensions and measurable acceleration in SAW resonators.

## Key findings

- The dimensions of sensitive elements significantly influence the measurable acceleration range.
- Experimental samples validated the simulation results for potential micromechanical accelerometer applications.
- The design shows promise for use in automotive g-sensors and high-overload industrial monitoring.

## Abstract

In preceding research endeavors, the frequency characteristics of a ring resonator on surface acoustic waves made of various materials were studied. Investigations encompassed fixation techniques within the housing, the impact of external variables on these components, and the most efficient configuration of the interdigital transducer within the ring resonator to curtail bandwidth. This current study is dedicated to investigating the correlation between sensitivity and the highest measurable acceleration concerning the dimensions of these sensitive elements. Furthermore, it involves assessing the attributes of produced experimental samples to verify the simulation results. The results obtained represent the possibility of creating a micromechanical accelerometer that can be used in the automotive industry as a g-sensor shock, as well as in industries where the numerical value of high overloads is required.