Fabrication of a multifunctional photonic integrated chip on lithium niobate on insulator using femtosecond laser assisted chemo-mechanical polish

TL;DR

This paper presents a novel fabrication method for multifunctional photonic integrated chips on lithium niobate on insulator, enabling complex optical components with reconfigurable functionalities using femtosecond laser assisted chemo-mechanical polishing.

Contribution

It introduces a new fabrication process combining femtosecond laser and chemo-mechanical polishing for multifunctional LNOI photonic chips with integrated reconfigurable components.

Findings

Successfully fabricated high extinction ratio beam splitter

Implemented a 1x6 optical switch

Realized a balanced 3x3 interferometer with reconfigurability

Abstract

We report fabrication of a multifunctional photonic integrated chip on lithium niobate on insulate (LNOI), which is achieved by femtosecond laser assisted chemo-mechanical polish. We demonstrate a high extinction ratio beam splitter, a 1 * 6 optical switch, and a balanced 3 * 3 interferometer on the fabricated chip by reconfiguring the microelectrode array integrated with the multifunctional photonic circuit.