# Fabrication of a multifunctional photonic integrated chip on lithium niobate on insulator using femtosecond laser assisted chemo-mechanical polish

## TL;DR

This paper presents a novel fabrication method for multifunctional photonic integrated chips on lithium niobate on insulator, enabling complex optical components with reconfigurable functionalities using femtosecond laser assisted chemo-mechanical polishing.

## Contribution

It introduces a new fabrication process combining femtosecond laser and chemo-mechanical polishing for multifunctional LNOI photonic chips with integrated reconfigurable components.

## Key findings

- Successfully fabricated high extinction ratio beam splitter
- Implemented a 1x6 optical switch
- Realized a balanced 3x3 interferometer with reconfigurability

## Abstract

We report fabrication of a multifunctional photonic integrated chip on lithium niobate on insulate (LNOI), which is achieved by femtosecond laser assisted chemo-mechanical polish. We demonstrate a high extinction ratio beam splitter, a 1 * 6 optical switch, and a balanced 3 * 3 interferometer on the fabricated chip by reconfiguring the microelectrode array integrated with the multifunctional photonic circuit.

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Source: https://tomesphere.com/paper/1908.01856