Accurate high-resolution depth profiling of magnetron sputtered transition metal alloy films containing light species: A multi-method approach

TL;DR

This study demonstrates a multi-method ion beam analysis approach to achieve high-resolution, accurate depth profiles of complex transition metal alloy films containing light species, improving material characterization for property correlation.

Contribution

It introduces an iterative, self-consistent multi-method analysis combining several ion-beam techniques for precise depth profiling of complex alloys, surpassing single-method limitations.

Findings

Enhanced accuracy in depth profiles of alloy composition.

Significant improvements in stoichiometry and thickness determination.

Better correlation of composition with material properties.

Abstract

We present an assessment of a multi-method approach based on ion beam analysis to obtain high-resolution depth profiles of the total chemical composition of complex alloy systems. As a model system we employ an alloy based on several transition metals and containing light species. Samples have been investigated by a number of different ion-beam based techniques, i.e., Rutherford Backscattering Spectrometry, Particle-Induced X-ray Emission, Elastic Backscattering Spectrometry and Time-of-Flight/Energy Elastic Recoil Detection Analysis. Sets of spectra obtained from these different techniques were analyzed both independently and following an iterative and self-consistent approach yielding a more accurate depth profile of the sample, including both metallic heavy constituents (Cr, Fe and Ni) as well as the rather reactive light species (C, O) in the alloy. A quantitative comparison in terms of achievable precision and accuracy is made and the limitations of the single method approach are discussed for the different techniques. The multi-method approach is shown to yield significantly improved and accurate information on stoichiometry, depth distribution, and thickness of the alloy with the improvements being decisive for a detailed correlation of composition to the material properties such as corrosion strength. The study also shows the increased relative importance of experimental statistics for the achievable accuracy in the multi-method approach.