# Accurate high-resolution depth profiling of magnetron sputtered transition metal alloy films containing light species: A multi-method approach

## TL;DR

This study demonstrates a multi-method ion beam analysis approach to achieve high-resolution, accurate depth profiles of complex transition metal alloy films containing light species, improving material characterization for property correlation.

## Contribution

It introduces an iterative, self-consistent multi-method analysis combining several ion-beam techniques for precise depth profiling of complex alloys, surpassing single-method limitations.

## Key findings

- Enhanced accuracy in depth profiles of alloy composition.
- Significant improvements in stoichiometry and thickness determination.
- Better correlation of composition with material properties.

## Abstract

We present an assessment of a multi-method approach based on ion beam analysis to obtain high-resolution depth profiles of the total chemical composition of complex alloy systems. As a model system we employ an alloy based on several transition metals and containing light species. Samples have been investigated by a number of different ion-beam based techniques, i.e., Rutherford Backscattering Spectrometry, Particle-Induced X-ray Emission, Elastic Backscattering Spectrometry and Time-of-Flight/Energy Elastic Recoil Detection Analysis. Sets of spectra obtained from these different techniques were analyzed both independently and following an iterative and self-consistent approach yielding a more accurate depth profile of the sample, including both metallic heavy constituents (Cr, Fe and Ni) as well as the rather reactive light species (C, O) in the alloy. A quantitative comparison in terms of achievable precision and accuracy is made and the limitations of the single method approach are discussed for the different techniques. The multi-method approach is shown to yield significantly improved and accurate information on stoichiometry, depth distribution, and thickness of the alloy with the improvements being decisive for a detailed correlation of composition to the material properties such as corrosion strength. The study also shows the increased relative importance of experimental statistics for the achievable accuracy in the multi-method approach.

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Source: https://tomesphere.com/paper/1812.10340