Microfabrication of Three-Dimensional Structures in Polymer and Glass by Femtosecond Pulses

TL;DR

This paper presents advanced 3D laser microfabrication techniques using femtosecond pulses, enabling precise structuring of polymers and glasses at sub-micrometer scales through holography and damage induction.

Contribution

It introduces two novel methods for 3D microfabrication in transparent materials using nonlinear optical excitation with ultrashort laser pulses.

Findings

Achieved microstructuring at 0.2-1 micrometers scale.

Demonstrated holographic recording for 3D patterning.

Utilized light-induced damage for material modification.

Abstract

We report three-dimensional laser microfabrication, which enables microstructuring of materials on the scale of 0.2-1 micrometers. The two different types of microfabrication demonstrated and discussed in this work are based on holographic recording, and light-induced damage in transparent dielectric materials. Both techniques use nonlinear optical excitation of materials by ultrashort laser pulses (duration < 1 ps).