Mechanical Dissipation in Silicon Flexures
S. Reid, G. Cagnoli, D.R.M. Crooks, J. Hough, P. Murray, S. Rowan,, M.M. Fejer, R. Route, S. Zappe

TL;DR
This study measures the mechanical dissipation in silicon cantilevers across a wide temperature range, revealing low dissipation levels that are promising for gravitational wave detector components.
Contribution
It provides new empirical data on silicon's thermo-mechanical dissipation properties relevant for high-precision optical applications.
Findings
Dissipation approaches phi = 4.4E-7 at low temperatures
Measured dissipation over 85 K to 300 K
Silicon shows promising low-loss characteristics
Abstract
The thermo-mechanical properties of silicon make it of significant interest as a possible material for mirror substrates and suspension elements for future long-baseline gravitational wave detectors. The mechanical dissipation in 92um thick <110> single-crystal silicon cantilevers has been observed over the temperature range 85 K to 300 K, with dissipation approaching levels down to phi = 4.4E-7.
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Taxonomy
TopicsSuperconducting Materials and Applications · Advanced MEMS and NEMS Technologies · Spacecraft and Cryogenic Technologies
