Applications of the MRI-model in sputter depth profiling

TL;DR

This paper explains the MRI model's principles and provides a Visual Basic implementation to help reconstruct original concentration profiles in sputter depth profiling techniques like AES, XPS, and SIMS.

Contribution

It introduces a detailed explanation of the MRI model and offers a practical Visual Basic program for calculating and reconstructing concentration-depth profiles.

Findings

The MRI model effectively reconstructs original in-depth distributions.

The Visual Basic program facilitates practical application of the model.

The approach improves interpretation of sputter depth profiling data.

Abstract

The physical principles of the MRI model (abbreviation for mixing-roughness- information depth) for the theoretical calculation of measured concentration- depth profiles obtained in sputter depth profiling with AES, XPS, SIMS, etc. are outlined. The main features of the calculation and the respective visual Basic program are explained. Examples demonstrate the usefulness of the current approach for the reconstruction of the original in-depth distribution of composition.