Quantitative topographic imaging using a near-field scanning microwave microscope

TL;DR

This paper introduces a microwave microscopy technique that quantitatively images surface topography by monitoring resonant frequency shifts, achieving nanometer-scale height resolution at microwave frequencies.

Contribution

The authors develop a method to extract quantitative topographic data using a near-field microwave microscope, demonstrating high-resolution imaging of conducting surfaces.

Findings

Achieves 55 nm height discrimination at 30 microns separation

Provides topographic images of conducting samples

Matches experimental results with theoretical models

Abstract

We describe a technique for extracting topographic information using a scanning near-field microwave microscope. By monitoring the shift of the system's resonant frequency, we obtain quantitative topographic images of uniformly conducting metal surfaces. At a frequency of 9.572 GHz, our technique allows for a height discrimination of about 55 nm at a separation of 30 microns. We present topographic images of uneven, conducting samples and compare the height response and sensitivity of the system with theoretical expectations.