X-ray Absorption Study of Pulsed Laser Deposited Boron Nitride Films

TL;DR

This study uses X-ray absorption spectroscopy to analyze boron nitride thin films grown by pulsed laser deposition, revealing their bonding structure, phase composition, and effects of growth conditions on disorder.

Contribution

It provides detailed spectroscopic analysis of BN films, identifying their primary bonding and phase characteristics, and correlates growth parameters with film disorder.

Findings

Films mainly consist of $sp^2$ bonds.

Presence of secondary phases like cubic or rhombohedral BN.

Higher deposition rates and ion-beam voltages increase disorder.

Abstract

B and N K-edge x-ray absorption spectroscopy measurements have been performed on three BN thin films grown on Si substrates using ion-assisted pulsed laser deposition. Comparison of the films' spectra to those of several single-phase BN powder standards shows that the films consist primarily of $sp^2$ bonds. Other features in the films' spectra suggest the presence of secondary phases, possibly cubic or rhombohedral BN. Films grown at higher deposition rates and higher ion-beam voltages are found to be more disordered, in agreement with previous work.