Influence of fractional composition of crystallite grains on the dark conductivity in fully crystallized undoped microcrystalline silicon

TL;DR

This study explores how the fractional composition of crystallite grains in fully crystallized undoped microcrystalline silicon films influences their dark conductivity, linking microstructure to electrical properties.

Contribution

It introduces the fractional composition of crystallite grains as a key microstructural feature affecting electrical transport in microcrystalline silicon.

Findings

Fractional composition correlates with electrical transport properties.

Microstructure influences dark conductivity.

Crystallite grain features can predict electrical behavior.

Abstract

Improvement in film growth technology requires a knowledge of the correlation between microstructural and deposition parameters with electrical properties in hydrogenated microcrystalline Si films. Our study indicates that fractional compositions of the constituent crystallite grains in fully crystallized undoped microcrystalline Si films is a unique microstructural feature that defines the film microstructure and can be well correlated to the electrical transport properties as well.