SiOx/Si radial superlattices and microtube optical ring resonators

TL;DR

This paper reports the fabrication of SiOx/Si microtubes and radial superlattices that are thermally stable and exhibit visible light emission, with optically resonant modes confirmed by simulations and polarization analysis.

Contribution

It introduces a novel method to create thermally stable SiOx/Si microtubes with optical resonances and polarization properties, advancing integrated photonics.

Findings

Microtubes are thermally stable up to 850°C.

Resonant optical modes are observed and match simulations.

Modes are strictly polarized along the tube axis.

Abstract

Scanning and transmission electron microscopy reveal that SiOx/Si layers can roll-up into microtubes and radial superlattices on a Si substrate. These hybrid objects are thermally stable up to 850 C and emit light in the visible spectral range at room temperature. For tubes disengaged from the substrate surface, optically resonant emission with mode spacings inversely proportional to the tube diameter are observed and agree excellently with those obtained from Finite-Different-Time-Domain simulations. The resonant modes we record are strictly polarized along the tube axis.