Kinetic Monte Carlo simulation of the nitridation of the GaAs (100) surfaces
A. P. Castro, H. W. Leite Alves

TL;DR
This study uses kinetic Monte Carlo simulations to investigate how nitrogen atoms adsorb and interact with GaAs (100) surfaces, revealing preferences for unoccupied sites and the dynamics of N island formation during epitaxial growth.
Contribution
It provides the first systematic theoretical analysis of nitrogen adsorption and island formation on GaAs (100) surfaces using kinetic Monte Carlo methods.
Findings
N atoms prefer unoccupied sites near As dimers
N pushes As dimers out, causing anion exchange
Insights into N island formation during III-Nitride growth
Abstract
We present, in this work, our preliminary results of a systematic theoretical study of the adsorption of N over As-terminated GaAs (100) (21) surfaces. We analyzed the changes in the bond-lenghts, bond-angles and the energetics involved before and after deposition. Our results show that the N-atoms will prefer the unoccupied sites of the surface, close to the As dimer. The presence of the N pushes the As dimer out of the surface, leading to the anion exchange between the N and As atoms. Based on our results, we discussed about the kinetics of the N islands formation during epitaxial growth of the III-Nitrides.
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