Dynamic Electrophysical Characterization of Porous Silicon based Humidity Sensitive Elements

TL;DR

This paper investigates how porous silicon humidity sensors respond dynamically to humidity changes by analyzing charge-voltage and current-voltage characteristics, demonstrating the effectiveness of electrophysical methods for rapid humidity detection.

Contribution

It introduces a dynamic electrophysical characterization approach for porous silicon humidity sensors, revealing process mechanisms and response times under fast humidity variations.

Findings

High voltage current-voltage curves indicate ionic conductor-like behavior.

Electrophysical characteristics change with adsorption-dissociation and transfer-desorption processes.

Methods effectively study porous materials' response to rapid humidity changes.

Abstract

The results of the investigation of changes of parameters of dynamic bipolar charge-voltage and bipolar and unipolar dynamic current-voltage characteristics and transient currents connected with the pulse change of humidity for the samples of por-Si are presented. The view of high voltage current-voltage curves is characteristic for poling processes in the space charge region similar to that observed in the case of typical ionic conductors. Observed phases of transformation of investigated electrophysical characteristics reflect the time scale of processes in the consequence adsorption-dissociation and transfer - desorption. The efficiency of using the methods of dynamic electrophysical characterization for studying characteristics of porous materials under fast humidity changes was demonstrated.