Friction in nanoelectromechanical systems: Clamping loss in the GHz regime

TL;DR

This paper develops a comprehensive theory of clamping loss in nanoelectromechanical resonators, showing that elastic energy radiation into supports significantly affects their quality factor at GHz frequencies.

Contribution

It introduces a detailed theoretical framework for understanding friction due to elastic radiation in high-frequency NEMS, highlighting its importance at microwave frequencies.

Findings

Elastic radiation rate increases with resonator frequency

Clamping loss significantly impacts quality factor at GHz frequencies

The theory predicts important implications for future microwave NEMS devices

Abstract

The performance of a wide variety of ultra-sensitive devices employing nanoelectromechanical resonators is determined by their mechanical quality factor, yet energy dissipation in these systems remains poorly understood. Here we develop a comprehensive theory of friction in high frequency resonators caused by the radiation of elastic energy into the support substrate, referred to as clamping loss. The elastic radiation rate is found to be a strong increasing function of resonator frequency, and we argue that this mechanism will play an important role in future microwave-frequency devices.