AFM's path to atomic resolution
Franz J. Giessibl

TL;DR
This paper reviews the advancements in atomic force microscopy (AFM) in vacuum, highlighting key developments, challenges, and future prospects for achieving atomic resolution.
Contribution
It provides a comprehensive overview of the progress and technological solutions that have enabled higher spatial resolution in AFM over twenty years.
Findings
Significant improvements in AFM resolution over two decades.
Identification of main challenges and solutions in AFM development.
Future applications and potential for atomic resolution imaging.
Abstract
We review the progress in the spatial resolution of atomic force microscopy (AFM) in vacuum. After an introduction of the basic principle and a conceptual comparison to scanning tunneling microscopy, the main challenges of AFM and the solutions that have evolved in the first twenty years of its existence are outlined. Some crucial steps along the AFM's path towards higher resolution are discussed, followed by an outlook on current and future applications.
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