Ultra narrow AuPd and Al wires

TL;DR

This paper introduces a new template technique for fabricating ultra-narrow wires, successfully producing and measuring AuPd and Al wires narrower than 10 nm, including materials with strong surface oxides.

Contribution

A novel versatile template method enabling fabrication of sub-10 nm wires, including materials with surface oxides, demonstrated with AuPd and Al wires of significant length.

Findings

AuPd wires 12 nm wide and 20 μm long were fabricated and measured.

Al wires with widths smaller than 10 nm and lengths over 10 μm were successfully produced.

The technique works with materials that form strong superficial oxides.

Abstract

In this letter we discuss a novel and versatile template technique aimed to the fabrication of sub-10 nm wide wires. Using this technique, we have successfully measured AuPd wires, 12 nm wide and as long as 20 $\mu$m. Even materials that form a strong superficial oxide, and thus not suited to be used in combination with other techniques, can be successfully employed. In particular we have measured Al wires, with lateral width smaller or comparable to 10 nm, and length exceeding 10 $\mu$m.