On several correlation integrals of the deep level transients
Pham Quoc Trieu, Hoang Nam Nhat

TL;DR
This paper provides a theoretical analysis of correlation integrals of capacitance transients in deep level spectroscopy, highlighting methods to detect deep levels through temperature dependence and proposing a new scanning technique.
Contribution
It introduces a theoretical framework for correlation integrals of capacitance transients and suggests a novel scanning technique for analyzing deep levels.
Findings
Average emission factor en can be obtained from correlation integrals.
Average activation energy E can be detected via shift operators with temperature.
Separation of overlapping exponential decays is non-unique, emphasizing temperature dependence analysis.
Abstract
This works presents the theoretical study on several correlation integrals of the capacitance transients of the deep levels. The deconvolution of the transient signals was the major subject of the number of methods referred to under the common name as the Deep Level Transient Spectroscopy methods. In general the separation of the overlapping exponential decays C(t) does not provide a unique solution, so the detection of the closely spaced deep levels by these transients should base mainly on the temperature dependence C(T), not only on the C(t). The results show that the average emission factor en is obtainable directly from various correlation integrals of the capacitance transients and the average activation energy E of the deep levels is detectable via the shift operators of the transients according to the temperature. A new scanning technique is suggested.
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Taxonomy
TopicsIntegrated Circuits and Semiconductor Failure Analysis · Silicon and Solar Cell Technologies · CCD and CMOS Imaging Sensors
