# Recent Advances in MEMS Actuators for Microfluidic Applications: Emerging Designs, Multiphysics Modeling, and Performance Optimization

## TL;DR

This paper reviews recent advancements in MEMS actuators for microfluidic systems, focusing on new designs, modeling techniques, and performance improvements.

## Contribution

The paper provides a comprehensive review of emerging MEMS actuator designs and modeling approaches for microfluidic applications.

## Key findings

- MEMS actuators have advanced significantly in materials and fabrication over the past decade.
- Multiphysics modeling has improved the design and performance optimization of MEMS actuators.
- Challenges remain in power efficiency, thermal control, and standardization for large-scale applications.

## Abstract

This review deals with the development and progress of micro-electromechanical systems (MEMS) actuators, which are needed in microfluidic applications, such as lab-on-a-chip and diagnostics. In the last 10 years, there have been tremendous advances in materials, microfabrication and computational modeling that have increased the functionality and scope of MEMS-based microfluidic actuation. This study classifies MEMS actuators on the basis of the physical method of actuation, including electrostatic, piezoelectric, and pneumatic actuation designs, in comparison with their application in pumping, valving, and droplet control. It examines the suitability of emerging structural and functional materials, such as piezoelectric thin-films and electroactive polymers, paying special attention to their reliability and biocompatibility. It also highlights the progress in multiphysics modeling that incorporates electrical, thermal, mechanical, and fluidic models, which facilitates the efficient design and performance optimization procedures. Other trends are multifunctional actuators with built-in sensing capability and the use of artificial intelligence (AI)-assisted design in production. With these developments, however, there exist issues of power efficiency, thermal control, fabrication uniformity and operational durability, and also the absence of standardized benchmarking. Finally, future research directions are outlined, including hybrid MEMS actuation, intelligent microfluidic operations, to improve the performance of the system and enable the transfer of the lab demonstrations to the large scale application of the system.