Flow-Induced Dynamic Dispersion in Dispersant-Free Mixed-Oxide Slurry Systems
Yu-An Lin, Feng-Ming Yeh, Bin Hu, Ting-Kai Huang, Hsin-Hsien Lu, Hong Zhong, Chia-Chen Li
TL;DR
This study shows that mixing different-sized silica particles improves slurry performance in planarization better than chemical dispersants.
Contribution
A particle-mixing strategy outperforms chemical dispersants in dynamic dispersion and CMP performance.
Findings
Bimodal suspensions show nearly Newtonian flow behavior and suppress agglomeration.
CMP tests show higher material removal rates and lower surface roughness with bimodal suspensions.
Simulations reveal denser particle contacts and higher stresses in bimodal systems.
Abstract
This study demonstrates that a particle-mixing strategy in aqueous suspension is more effective than chemical dispersants in enhancing the dynamic dispersion and performance of SiO2-based slurries for planarization applications. By preparing particle-mixed suspensions containing 25 and 55 nm SiO2 particles at chemical-mechanical planarization (CMP)-relevant solid loadings (1–10 wt %), we show that combining these two particle sizes suppresses agglomeration and transforms the suspension rheology from shear-thinning to a nearly Newtonian response under flow, indicating improved dynamic dispersion after yielding. Small-angle X-ray scattering and effective volume packing analyses confirm that cooperative size effects drive the improved structural organization, thereby enhancing flow behavior. In contrast, the commonly used ammonium polyacrylate dispersant enhances static dispersion but…
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Taxonomy
TopicsSurface Modification and Superhydrophobicity · Granular flow and fluidized beds · Advanced Surface Polishing Techniques