Advances in Porous Silicon Materials for Sensing, Energy Storage, and Microelectronics
Yujie Wang, Donghua Wang
TL;DR
This review explores how porous silicon can be used in sensing, energy storage, and microelectronics, focusing on fabrication methods and surface modifications.
Contribution
The paper systematically evaluates synthesis techniques and surface modification strategies for porous silicon, highlighting their impact on application performance.
Findings
Porous silicon can be fabricated using electrochemical anodization, MACE, and vapor-phase etching methods.
Surface modifications like thermal oxidation and ALD improve stability and functionalization of porous silicon.
Applications include sensing, energy storage, and microsystem technologies with structure–property relationships emphasized.
Abstract
Porous silicon (PSi), characterized by its high specific surface area and highly tunable morphology, presents significant potential across optoelectronics, energy storage, and biomedical applications. This review provides a systematic analysis of the synthesis methodologies, interfacial chemical engineering, and diverse applications of PSi. Initially, fabrication techniques are examined, contrasting the pore formation mechanisms of electrochemical anodization, metal-assisted chemical etching (MACE), and emerging vapor-phase etching methods, while elucidating the control of geometric parameters from microporous to macroporous scales. To address the thermodynamic instability of the hydride-terminated surface, this review systematically evaluates modification strategies such as thermal oxidation, hydrosilylation, carbonization, and atomic layer deposition (ALD). We critically analyze their…
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Taxonomy
TopicsSilicon Nanostructures and Photoluminescence · Nanowire Synthesis and Applications · Mesoporous Materials and Catalysis