# Recent Advances in Diamond-Capped GaN HEMTs for RF Application

**Authors:** Yuanmeng Xiang, Mei Wu, Haolun Sun, Shiming Li, Hongda Chen, Jiamin Wei, Binyan Yan, Ling Yang, Meng Zhang, Hao Lu, Bin Hou, Xiaohua Ma, Yue Hao

PMC · DOI: 10.3390/nano16040224 · 2026-02-09

## TL;DR

Diamond capping improves cooling in GaN transistors for better performance in high-power RF applications.

## Contribution

A review of recent technological advances in integrating diamond capping with GaN HEMTs for thermal management.

## Key findings

- Diamond capping reduces self-heating in GaN HEMTs due to its high thermal conductivity.
- Recent progress includes optimized thermal boundary resistance and process compatibility for diamond-GaN integration.
- Thermal simulations and film growth techniques have enhanced the performance of diamond-capped devices.

## Abstract

Self-heating effects severely limit the performance of gallium nitride high-electron-mobility transistors (GaN HEMTs) in high-power radio frequency (RF) applications. Diamond capping technology leveraging diamond’s exceptional thermal conductivity (>2000 W/m·K) has emerged as a highly promising near-junction cooling solution. However, its integration with GaN HEMTs faces challenges including lattice/thermal mismatch, high thermal boundary resistance (TBR), and process compatibility. This review summarizes recent progress in high-thermal-conductivity diamond film growth, TBR optimization, thermal simulations, and the integrated process with GaN devices. These technological breakthroughs enable diamond-capped GaN HEMTs with an excellent comprehensive performance. Continued advances in these fields will be critical for fully releasing the capabilities of diamond capping technology for GaN HEMTs in high-frequency and high-power applications.

## Full-text entities

- **Genes:** GAN (gigaxonin) [NCBI Gene 8139] {aka GAN1, GIG, KLHL16}, AIP (AHR interacting HSP90 co-chaperone) [NCBI Gene 9049] {aka ARA9, FKBP16, FKBP37, PITA1, SMTPHN, XAP-2}
- **Diseases:** PECVD (MESH:C564835), injury to (MESH:D014947), PCD (MESH:C535645)
- **Chemicals:** polymer (MESH:D011108), AlGaN (MESH:C513700), C (MESH:D002244), Ni (MESH:D009532), N (MESH:D009584), CH4 (MESH:D008697), SiO2 (MESH:D012822), graphite (MESH:D006108), Si (MESH:D012825), CH3  radicals (-), metal (MESH:D008670), Au (MESH:D006046), Gallium nitride (MESH:C473348), quartz (MESH:D011791), Ar (MESH:D001128), GaN (MESH:C050366), Diamond (MESH:D018130), hydrogen (MESH:D006859), Mo (MESH:D008982), BCB (MESH:C079040), AlN (MESH:C052045), SF6 (MESH:D013459), Al2O3 (MESH:D000537), HF (MESH:D006195), SiC (MESH:C022088), Dia (MESH:C076868), F (MESH:D005461)
- **Species:** Homo sapiens (human, species) [taxon 9606]

## Figures

9 figures with captions in the complete paper: https://tomesphere.com/paper/PMC12943555/full.md

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Source: https://tomesphere.com/paper/PMC12943555