# Correction: Ye, G.; Yao, Z. Research on the Trajectory and Relative Speed of a Single-Sided Chemical Mechanical Polishing Machine. Micromachines 2025, 16, 450

**Authors:** Guoqing Ye, Zhenqiang Yao

PMC · DOI: 10.3390/mi17020160 · Micromachines · 2026-01-26

## Full-text entities

- **Diseases:** injury to (MESH:D014947), CORRECTED (MESH:D000080041)
- **Species:** Homo sapiens (human, species) [taxon 9606]

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Source: https://tomesphere.com/paper/PMC12943132