# Editorial for the Special Issue on MEMS/NEMS Devices and Applications, 3rd Edition

**Authors:** Zhi-Xuan Dai, Takahito Ono, Ching-Liang Dai

PMC · DOI: 10.3390/mi17020205 · Micromachines · 2026-02-02

## Full-text entities

- **Diseases:** injury to (MESH:D014947), fracture (MESH:D050723)
- **Chemicals:** metal (MESH:D008670), lead zirconate titanate (MESH:C065536), XeF2 (MESH:C048007), stainless steel (MESH:D013193), steel (MESH:D013232), Ge (MESH:D005857), TiN (MESH:D014001), copper (MESH:D003300), ethanol (MESH:D000431), lanthanum (MESH:D007811), water (MESH:D014867), iron (MESH:D007501), carbon nanotubes (MESH:D037742), oil (MESH:D009821), aluminum (MESH:D000535), CMOS oxide (-), Si (MESH:D012825), indium tin oxide (MESH:C109984), brass (MESH:C048399), Polyurethane (MESH:D011140), Mo (MESH:D008982), oxide (MESH:D010087), SiC (MESH:C022088)
- **Species:** Homo sapiens (human, species) [taxon 9606]

## Full text

_Full body text omitted from this summary view._ Fetch the complete paper as Markdown: https://tomesphere.com/paper/PMC12943024/full.md

## Figures

1 figure with captions in the complete paper: https://tomesphere.com/paper/PMC12943024/full.md

## References

36 references — full list in the complete paper: https://tomesphere.com/paper/PMC12943024/full.md

---
Source: https://tomesphere.com/paper/PMC12943024