# High-Sensitivity Plasmonic Temperature Sensor Based on a MIM Waveguide-Coupled TDSC Resonator

## TL;DR

This paper introduces a highly sensitive temperature sensor using a nanoscale plasmonic structure that could improve integrated photonic devices.

## Contribution

A novel MIM waveguide-coupled resonator with high sensitivity and figure of merit for temperature sensing is proposed.

## Key findings

- The sensor achieves a sensitivity of 2960 nm/RIU.
- The structure exhibits a figure of merit (FOM) of 59.79.
- Experimental results confirm high responsiveness in temperature sensing.

## Abstract

This paper presents a nanoscale sensor based on a metal–insulator–metal (MIM) waveguide coupled with a composite resonant cavity, where the ring resonator is embedded with triangular, semicircular, and rectangular structural elements. The transmission characteristics and sensing performance of the structure were systematically analyzed using the finite element method. The results indicate that the interference between the continuous mode in the waveguide and the discrete mode in the resonant cavity generates a distinct asymmetric Fano resonance. The optimized sensor achieves a sensitivity of 2960 nm/RIU and a figure of merit (FOM) of 59.79. Experimental verification confirms that the structure exhibits high responsiveness in temperature sensing, providing an effective solution for integrated photonic devices.