Micro-Hotplate for Thermocatalytic Gas Sensor Fabricated by Ceramic Laser Micromachining
Nikolay Samotaev, Gennady Zebrev, Konstantin Oblov, Maya Etrekova, Pavel Dzhumaev, Ivan Obraztsov, Boris Podlepetsky
TL;DR
A new low-power thermocatalytic gas sensor was developed using ceramic laser micromachining for improved performance and durability.
Contribution
The paper introduces a novel ceramic-based thermocatalytic sensor design with high-temperature capability and low power consumption.
Findings
The sensor can operate at temperatures up to 900 °C.
The design reduces power dissipation and improves resistance to poisoning.
The ceramic technology enables better mass production potential.
Abstract
Thermocatalytic sensors are used as universal explosion meters for measurement of the Lower Explosive Limit (LEL) of hydrocarbon gases mixtures. Historically, thermo-catalytic sensors, with their bulky “pellistor” design, have been poorly suited for mass production using group microelectronic processing. Another significant challenge for developers of new sensor designs is to minimize power dissipation while enhancing the service life and resistance of catalytic elements to poisoning from silicon–organic and sulfur-containing gases. To meet the specified requirements, we developed a low-power thermocatalytic sensor utilizing ceramic technology, capable of holding the temperature of technology operations up to 900 °C.
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Taxonomy
TopicsElectrical and Thermal Properties of Materials · Geophysics and Sensor Technology · Laser Design and Applications