Design and Vision-Based Calibration of a Five-Axis Precision Dispensing Machine
Ruizhou Wang, Jinyu Liao, Binghao Wang, Qifeng Zhong, Yongchao Dong, Han Wang
TL;DR
This paper introduces a vision-based system to calibrate a five-axis dispensing machine used in semiconductor packaging, improving its accuracy.
Contribution
A novel vision-based calibration method for five-axis dispensing machines using geometric error identification and kinematic modeling.
Findings
The VBM system detected a mean spatial position error of 59.9 μm in the end-effector.
Eight position-independent geometric errors were successfully identified using the proposed algorithm.
The approach offers an automated and feasible calibration solution for precision dispensing machines.
Abstract
Five-axis precision dispensing machines are employed for semiconductor packaging. The dispensing accuracy is significantly affected by multiple geometric errors among the five axes. This paper proposes a vision-based measurement (VBM) system for identifying geometric errors and calibrating kinematics. The VBM system is also employed to complete the detection of the workpiece. A kinematic model of the machine was established using a local product-of-exponential formulation of screw theory. A geometric error identification algorithm was designed. Eight position-independent geometric errors (PIGEs) and position-dependent geometric errors (PDGEs) were involved. The system of overdetermined equations was solved. Combining the singular value decomposition and regularization, eight PIGEs in the A and C axes were identified. Comprehensive error measurement results verified the proposed…
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Taxonomy
TopicsAdvanced Measurement and Metrology Techniques · Iterative Learning Control Systems · Optical measurement and interference techniques