# Mixed Co-Mn oxide coatings synthetized by DLI-MOCVD for SOC interconnect a parametric study for composition and homogeneity control

## TL;DR

This paper explores a method to create uniform mixed cobalt-manganese oxide coatings for use in solid oxide cells, suitable for industrial applications.

## Contribution

A novel DLI-MOCVD method is demonstrated to control composition and homogeneity of Co-Mn oxide coatings for SOC interconnects.

## Key findings

- Mixed Co-Mn oxide coatings with varying compositions from MnxCo1-xO to MnxCo3-xO4 were successfully synthesized.
- Uniform thickness and composition were achieved over 25 cm in a tubular reactor, suitable for industrial use.

## Abstract

The present study investigates the synthesis of mixed cobalt manganese oxide coating for Solid Oxide Cell (SOC) interconnect application using DLI-MOCVD (Direct Liquid Injection-Metal Oxide Chemical Vapor Deposition). The possibility to control the coating thickness and composition by injecting a mixed solution of Co(acac)3 and Mn(acac)3 precursors is demonstrated. Various oxide compositions from MnxCo1-xO to MnxCo3-xO4 are synthesized. An acceptable homogeneity in terms of thickness and composition is possible over 25 cm along a tubular reactor which makes this process suitable for industrial application.

The online version contains supplementary material available at 10.1038/s41598-025-23783-5.