# Thermal Sensitivity of a Microoptoelectromechanical Evanescent-Coupling-Based Accelerometer

## TL;DR

This paper examines how temperature affects the performance of a microoptoelectromechanical accelerometer based on evanescent coupling.

## Contribution

The study quantifies thermal sensitivity differences between directional coupler and resonator-based optical transducers in MOEM accelerometers.

## Key findings

- The refraction index of silicon nitride films increases by 0.12642 ppm/°C with temperature.
- Directional coupler transducers have a thermal sensitivity of 580 ppm/°C, while resonator-based ones have 0.33 °C−1.
- Thermal sensitivity from refraction index changes dominates over mechanical effects by 5-3000 times.

## Abstract

This treatise studies the thermal sensitivity of the mechanical and optical transmission coefficients of a microoptoelectromechanical (MOEM) accelerometer based on evanescent coupling in a temperature range from minus 40 to plus 125 °C. Two types of optical measuring transducers are considered: based on a directional coupler and a resonator. This analysis covers the optical and mechanical components of the thermal sensitivity of the transmission coefficient. In terms of the mechanical part, the temperature effect induces changes to the linear dimensions of the structure and material characteristics and causes internal mechanical stresses as well. The temperature effect on the optical system of the accelerometer is conditioned by the thermo-optic effect of the materials the optical waveguides are made of. This study includes experiments on the refraction index dependence on the temperature of the optical films that compose the optical system of the MOEM accelerometer. The experiment shows that the refraction index of the films grows with temperature and amounts to 0.12642 ppm/°C for silicon nitride on the SiO2/Si substrate. For the optical measuring transducer based on a directional coupler, the thermal sensitivity of the accelerometer’s optical transmission coefficient is 580 ppm/°C. For the resonator-based transducer, the thermal sensitivity is 0.33 °C−1. The thermal sensitivity of the normalized mechanical transmission coefficient of the accelerometer is 120 ppm/°C. For optical measuring transducers based on a directional coupler, the contribution of the temperature dependent refraction index alteration to the overall error is 5 times larger than that of the MOEM accelerometer’s mechanical parameters, while for the resonator-based transducer the difference reaches 3000 times. This means its operability is only possible in a thermostatic environment.