# A Novel Asymmetric High-Performance MEMS Pendulum Capacitive Accelerometer

## TL;DR

This paper introduces a new MEMS accelerometer with improved sensitivity and stability using an asymmetric design and advanced fabrication techniques.

## Contribution

The novelty lies in the asymmetric mass block design and the integration of a custom interface circuit for enhanced performance.

## Key findings

- The accelerometer achieved a sensitivity of 1.247 V/g in the measurement range of −2 g to 2 g.
- The nonlinearity of the sensor was measured at 0.8%, indicating high accuracy.
- The design demonstrated structural stability and improved performance through ICP etching.

## Abstract

In this study, we propose a novel asymmetric high-performance MEMS pendulum accelerometer comprising a sensitive structure and an interface circuit. The sensitive structure, designed with asymmetric mass blocks, significantly improves both sensitivity and structural stability. The sensor is fabricated using a double-side polished (100) N-type silicon wafer and its structure is ultimately realized through ICP (Inductively Coupled Plasma) etching. We also develop and fabricate the corresponding interface circuit. The accelerometer is evaluated through a static field roll-over test, demonstrating excellent performance with a sensitivity of 1.247 V/g and a nonlinearity of 0.8% within the measurement range of −2 g to 2 g.