A Higher-Yielding Route for the Synthesis of Molecular Precursors to Thin Films of Gold by Atomic Layer Deposition
Ryan K. Brown, Joseph N. Bunyan, Ashi Agrawal, Graeme Hogarth, Christopher S. Blackman, Leonardo Santoni, Eva Rimoldi Rudatis, Caroline E. Knapp, David Pugh
TL;DR
Researchers developed a new, efficient method to create gold thin films using a specific type of chemical precursor.
Contribution
A high-yielding synthesis route for [AuMe2(dtc)] complexes as potential precursors for gold thin films via atomic layer deposition.
Findings
The volatility of the precursor decreases with increasing precursor mass, reducing suitability for thin film deposition.
[AuMe2(Me2dtc)] is a better precursor than [AuMe2(Et2dtc)] due to higher volatility and lower residual mass.
Abstract
A synthetically straightforward and high-yielding route to the series of complexes [AuMe2(dtc)] (dtc = dithiocarbamate) has been developed using dialkyl-, cyclic-dialkyl-, and diaryldithiocarbamate ligands. These compounds were screened by thermogravimetric analysis (TGA) to determine their viability as molecular precursors to thin films of elemental gold by atomic layer deposition. TGA revealed that the volatility of the precursor decreased as the mass of the precursor increased, making the heavier molecules less suitable precursors. However, [AuMe2(Me2dtc)], the lightest member of the series, is potentially a better precursor than [AuMe2(Et2dtc)] due to its higher volatility and slightly lower residual mass.
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Taxonomy
TopicsMolecular Junctions and Nanostructures · Nanocluster Synthesis and Applications · Semiconductor materials and devices