# Demonstration of Directly Nanoimprinted Silica–Titania Large-Size Vertical Grating Couplers for Multichannel Photonic Sensor Development

## TL;DR

Researchers developed a large vertical grating coupler using nanoimprinting to enable multichannel optical sensors.

## Contribution

A novel fabrication method for large-area vertical grating couplers using direct nanoimprinting in silica-titania films.

## Key findings

- A sol-gel and dip-coating process enabled precise control of waveguide film properties.
- Multiple quasi-parallel input beams were successfully coupled through the fabricated vertical grating coupler.
- The design suggests potential for low-cost multichannel optical sensor chips.

## Abstract

The article discusses the design, fabrication, and experimental evaluation of a large-area vertical grating coupler (VGC) enabling simultaneous coupling of multiple input optical beams. The presented VCG was fabricated by direct nanoimprinting of a grating pattern in a non-hardened SiOX:TiOY waveguide (WG) film. The WG film was deposited on a glass substrate using a combination of the sol–gel method and the dip-coating technique. The fabrication process allowed precise control of the waveguide film thickness and refractive index, as well as the VGC geometry. The relevance of the process was proved by a demonstration of optical coupling of multiple quasi-parallel input beams via the VGC to the WG layer. To make this possible, a dedicated optical coupling system was designed, including a polymer microlens array and optical fiber array positioned in a V-groove. This opens promising perspectives on using the proposed structure for the fabrication of low-cost multichannel optical sensor chips, as highlighted in the article’s final section.