# Design Considerations of an Analog Voltage Mode Readout Circuit for the CMOS-SOI-MEMS Gas Sensor Dubbed GMOS

**Authors:** Efraim-Lavi Bukshish, Sharon Bar-Lev, Tanya Blank, Yael Nemirovsky

PMC · DOI: 10.3390/mi16060658 · Micromachines · 2025-05-30

## TL;DR

This paper discusses a new design for gas sensors using CMOS-SOI-MEMS technology, emphasizing the benefits of chiplet-based approaches over traditional monolithic designs.

## Contribution

The novelty lies in proposing a voltage mode readout design for GMOS sensors and advocating a paradigm shift towards chiplet-based sensor systems.

## Key findings

- A monolithic GMOS system using voltage mode reading was designed and validated for the first time.
- Chiplet-based designs are preferable due to conflicting requirements between sensors and readout circuitry in traditional gas sensors.

## Abstract

Modern gas sensor technology is becoming an important part of our lives. Hence, there has been considerable effort over the past 25 years towards the goal of creating low-cost gas sensors by employing modern microelectronics technology to manufacture both the sensing element and the signal conditioning circuitry on single silicon chips. CMOS sensors based on CMOS-SOI-MEMS technology seemed to be a good candidate for the monolithic approach. In this study, we critically review this approach. We show the advantages of chiplet-based designs for gas sensors that are based on CMOS-SOI-MEMS technology, dubbed GMOSs. The design of a monolithic GMOS system based on the voltage mode reading of a GMOS transistor connected in a three-terminal configuration is presented and validated for the first time. This study led to the understanding that a chiplet-like design should be preferred since the sensor and the readout circuitry of traditional gas sensors exhibit conflicting technological requirements. The innovation of this work is both in the readout design that it posits and in the resulting paradigm shift.

## Full-text entities

- **Diseases:** injury to (MESH:D014947)
- **Chemicals:** oxygen (MESH:D010100), ethylene (MESH:C036216), MOSFET (-), ethanol (MESH:D000431), silicon (MESH:D012825), DAC (MESH:D000077209), volatile organic compound (MESH:D055549), oxide (MESH:D010087)
- **Species:** Homo sapiens (human, species) [taxon 9606]

## Full text

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## Figures

15 figures with captions in the complete paper: https://tomesphere.com/paper/PMC12195211/full.md

## References

20 references — full list in the complete paper: https://tomesphere.com/paper/PMC12195211/full.md

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Source: https://tomesphere.com/paper/PMC12195211