Biaxial Non-Resonant Electromagnetically Driven Scanning Micromirror with Large Aperture
Tong Wang, Yu Jian, Chen Liu, Manpeng Chang, Xin Wang, Weimin Wang
TL;DR
This paper introduces a large-aperture scanning micromirror that achieves wide scanning angles and low fabrication costs, suitable for LiDAR and optical communication.
Contribution
A novel large-aperture biaxial scanning micromirror design with non-resonant operation and low-cost fabrication is proposed.
Findings
The micromirror achieves 61.4° and 61.1° optical scanning angles in x and y axes with low DC currents.
The design uses a CNC milling process, reducing fabrication costs significantly.
Biaxial independent control is experimentally verified in non-resonant mode.
Abstract
To address the challenges of small aperture size, limited scanning angles, and high fabrication costs in existing scanning micromirrors, this paper proposes a large-aperture biaxial electromagnetically driven scanning micromirror. The scanning micromirror utilizes a stainless-steel mirror structure and an actuation structure composed of arc-shaped permanent magnets (NdFeB 52), iron cores, and copper coils. By optimizing the magnet layout and coil design, it achieves large optical scanning angles in biaxial non-resonant scanning mode. Experimental results demonstrate that the optical scanning angles reach 61.4° (x-axis) under a DC driving current of ±18.1 mA and 61.1° (y-axis) under a DC driving current of ±25.2 mA with an effective mirror aperture of 9.54 mm × 10 mm. The resonant frequencies are 89 Hz (x-axis) and 63 Hz (y-axis). Experimental results verify the feasibility of biaxial…
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Taxonomy
TopicsAdvanced MEMS and NEMS Technologies · Advanced Surface Polishing Techniques · Advanced Measurement and Metrology Techniques