Research on Drive and Detection Technology of CMUT Multi-Array Transducers Based on MEMS Technology
Chenyuan Li, Jiagen Chen, Chengwei Liu, Yao Xie, Yangyang Cui, Shiwang Zhang, Zhikang Li, Libo Zhao, Guoxing Chen, Shaochong Wei, Yu Gao, Linxi Dong
TL;DR
This paper describes a new ultrasonic system using CMUT arrays and MEMS technology for high-quality imaging.
Contribution
The paper introduces a novel CMUT multi-array transducer system with integrated driving and detection capabilities.
Findings
The CMUT array achieves a center frequency of 1.4995 MHz and a relative bandwidth of 127.9% in silicone oil.
The system successfully generates high-quality ultrasonic echo signals suitable for imaging.
A two-stage amplification circuit and Butterworth filtering improve signal reception and processing.
Abstract
This paper presents an ultrasonic driving and detection system based on a CMUT array using MEMS technology. Among them, the core component CMUT array is composed of 8 × 8 CMUT array elements, and each CMUT array element contains 6 × 6 CMUT units. The collapse voltage of a single CMUT unit obtained through finite element analysis is 95.91 V, and the resonant frequency is 3.16 MHz. The driving section achieves 64-channel synchronous driving, with key parameters including an adjustable excitation signal frequency ranging from 10 kHz to 5.71 MHz, a delay precision of up to 1 ns, and an excitation duration of eight pulse cycles. For the echo reception, a two-stage amplification circuit for high-frequency weak echoes with 32 channels was designed, achieving a gain of 113.72 dB and −3 dB bandwidth of 3.89 MHz. Simultaneously, a 32-channel analog-to-digital conversion based on a…
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Taxonomy
TopicsPhotoacoustic and Ultrasonic Imaging · Ultrasound Imaging and Elastography · Ultrasonics and Acoustic Wave Propagation