Bulk Acoustic Wave Resonance Characteristics of PMN-PT Orthorhombic Crystal Plates Excited by Lateral Electric Fields
Boyue Su, Yujie Zhang, Feng Yu, Pengfei Kang, Tingfeng Ma, Peng Li, Zhenghua Qian, Iren Kuznetsova, Vladimir Kolesov
TL;DR
This paper studies how lateral electric fields affect acoustic wave resonance in PMN-PT crystal plates, offering insights for optimizing sensor designs.
Contribution
A new model using Mindlin theory and FEM simulations to analyze and optimize LFE BAW devices based on orthorhombic crystals.
Findings
Motional capacitance, resonant frequency, and mode shape were determined for LFE BAW devices.
Electrode parameters significantly influence resonance characteristics of the devices.
Structural parameters affect mass sensitivity, verified through FEM simulations.
Abstract
For relaxor ferroelectric single crystal (1 − x)Pb(Mg1/3Nb2/3)O3 − xPbTiO3 (PMN-PT), through reasonable component regulation and electric field polarization, an orthogonal mm2 point group structure can be obtained, which has high piezoelectric constants and is, therefore, a desired substrate material for lateral-field-excited (LFE) bulk acoustic wave (BAW) devices. In this work, acoustic wave resonance characteristics of (zxt) 45° PMN-PT BAW devices with LFE are investigated. Firstly, Mindlin first-order plate theory is used to obtain vibration governing equations of orthorhombic crystals excited by a lateral electric field. By analyzing the electrically forced vibrations of the finite plate, the basic vibration characteristics, such as motional capacitance, resonant frequency, and mode shape are obtained, and influences of different electrode parameters on resonance characteristics of…
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Taxonomy
TopicsAcoustic Wave Resonator Technologies · Ferroelectric and Piezoelectric Materials · Ultrasonics and Acoustic Wave Propagation