Development of a Piezoelectric-Driven XYθz Nano-Positioning Stage with High Load-Bearing Capacity Enabled by Over-Constrained Guiding Configuration
Bin Liu, Lingchen Meng, Shuaishuai Lu, Fei Wang, Pengbo Liu, Peng Yan
TL;DR
A new nano-positioning stage with high load-bearing capacity is developed using an over-constrained guiding configuration for precise three-axis motion.
Contribution
The novel over-constrained XYθz nano-positioning stage with enhanced load-bearing and anti-deformation capabilities is introduced.
Findings
The stage achieves a motion range of up to 152.22 μm × 151.3 μm × 2.885 mrad.
It maintains anti-deformation capability of 200 nm under 4 kg loading.
Hybrid amplification mechanisms improve displacement output and structural stiffness.
Abstract
A novel over-constrained XYθz nano-positioning stage with a high load-bearing capacity is proposed. This serially connected displacement stage adopts an embedded structural design that integrates a translation stage with a rotation stage in series. The Z-axis amplification mechanism employs out-of-plane actuation, realising a compact solution for three-axis independent motion. The hybrid amplification mechanism designed in the translation stage ensures enhanced output displacement and structural stiffness. The hybrid-parallel amplification mechanism comprises a lever-type displacement amplifier and a Scott–Russell displacement amplifier connected in series, which is then connected in parallel with a bridge-type displacement amplifier. An over-constrained mechanism is introduced to impose redundant constraints along the Z-axis, effectively suppressing parasitic displacement in the…
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Taxonomy
TopicsPiezoelectric Actuators and Control · Force Microscopy Techniques and Applications · Nanofabrication and Lithography Techniques