# Two Degrees of Freedom Synchronous Motion Modulation Technique Using MEMS Voltage-Controlled Oscillator-Based Phase-Locked Loop for Magnetoresistive Sensing

**Authors:** Zhenyu Shi, Zhenxiang Qi, Haoqi Lyu, Qifeng Jiao, Chen Chen, Xudong Zou

PMC · DOI: 10.3390/s25061835 · 2025-03-15

## TL;DR

A new system improves magnetoresistive sensors by reducing noise using synchronized motion modulation.

## Contribution

The TDSMM-DPLL system introduces a novel dual resonator setup for enhanced low-frequency magnetic field detection.

## Key findings

- The system achieved a modulation efficiency of 38.98%, surpassing traditional methods.
- Frequency Allan variance was reduced by 3.13 times, showing effective noise suppression.

## Abstract

This study presents a novel dual phase-locked loop two-dimensional synchronized motion modulation (TDSMM-DPLL) system designed to enhance the low-frequency detection capability of magnetoresistive (MR) sensors by effectively mitigating 1/f noise. The TDSMM-DPLL system integrates a comb-driven resonator and a piezoelectric cantilever beam resonator, achieving synchronized magnetic field modulation through a DPLL circuit that adjusts the resonant frequency of the comb-driven resonator to twice that of the cantilever beam resonator. Theoretical analysis and finite element simulations demonstrate a modulation efficiency of 38.98%, which is significantly higher than that of traditional one-dimensional modulation methods. Experimental validation confirms the system’s effectiveness, showing a 3.13-fold reduction in frequency Allan variance, decreasing from 217.32 ppb to 69.46 ppb, indicating substantial noise suppression. These results highlight the TDSMM-DPLL system’s potential to improve the performance of MR sensors in low-frequency applications, making it a promising solution for high-precision magnetic field detection.

## Full-text entities

- **Diseases:** DPLL (MESH:D000080422), injury to (MESH:D014947), MMM (MESH:D009041), TDSMM (MESH:D009378)
- **Chemicals:** aluminum nitride (MESH:C052045), gold (MESH:D006046), MgO (MESH:D008277), oxide (MESH:D010087), SiO2 (MESH:D012822), PCB (MESH:D011078), DETF (-), Silicon (MESH:D012825), TMAH (MESH:C027917), titanium (MESH:D014025)
- **Species:** Homo sapiens (human, species) [taxon 9606]

## Figures

11 figures with captions in the complete paper: https://tomesphere.com/paper/PMC11945325/full.md

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Source: https://tomesphere.com/paper/PMC11945325