Resonant Drive Techniques for Electrostatic Microelectromechanical Systems (MEMS): A Comparative Study
Rana Abdelrahman, Alaaeldin Elhady, Yasser S. Shama, Mohamed Abdelrahman, Alexis Jollivet, Dogu Ozyigit, Mustafa Yavuz, Eihab M. Abdel-Rahman
TL;DR
This paper compares different resonant drive techniques to improve high-frequency electrostatic actuation in MEMS.
Contribution
The study introduces a comparative analysis of resonance matching, multi-frequency excitation, and amplitude modulation for MEMS actuation.
Findings
Resonant circuits outperform traditional voltage amplifiers in high-frequency MEMS actuation.
Resonance matching, multi-frequency excitation, and amplitude modulation are effective methods for voltage amplification.
The performance of each technique is evaluated and compared in detail.
Abstract
Electrostatic actuation is widely employed in microelectromechanical systems (MEMS) due to its distinct advantages. However, it requires high voltage, typically provided by a power supply and a high voltage amplifier, which is limited in gain, especially at high frequencies. Various methods have been proposed to amplify the voltage signal fed into the system by coupling it in series to an LC tank circuit. In this work, we analyze and compare three methods, resonance matching, multi-frequency excitation, and amplitude modulation. We also compare their performance to that of a voltage amplifier. We demonstrate that resonant circuits significantly enhance performance, offering a more effective solution for high-frequency MEMS actuation.
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Taxonomy
TopicsAdvanced MEMS and NEMS Technologies · Mechanical and Optical Resonators · Acoustic Wave Resonator Technologies