3D Strain Imaging of a Heterostructured GaInP/InP Nanowire Using Bragg Coherent Diffraction X-ray Imaging: Implications for Optoelectronic Devices
Huaiyu Chen, Megan O. Hill, Magnus T. Borgström, Jesper Wallentin

TL;DR
This study uses advanced X-ray imaging to map strain in a nanowire, showing how it can help design better optoelectronic devices.
Contribution
The study demonstrates 3D strain imaging in a GaInP/InP nanowire using BCDI with high spatial resolution.
Findings
3D strain distribution in an InP segment of a nanowire was imaged with 14 nm resolution.
Measured strain magnitude suggests a higher Ga composition than expected.
Nanowire can accommodate lattice mismatch without exceeding coherency limits.
Abstract
Imaging the strain in nanoscale heterostructures is challenging since it requires a combination of high strain sensitivity and spatial resolution. Here, we show that three-dimensional (3D) Bragg coherent diffraction imaging (BCDI) can be used to image the strain in a single InP segment within an axially heterostructured GaInP–InP nanowire. We use a 350 nm-diameter X-ray beam, which is smaller than the nanowire but larger than the 180 nm long InP segment. The intense nanofocused beam induced angular distortions, but these are successfully removed by a correction algorithm. Additionally, we show that data from multiple scans can be merged despite scan-to-scan variations. The reconstruction of the merged data set has a spatial resolution of approximately 14 nm, revealing the 3D morphology of the InP segment and its internal strain distribution. The measured strain shows qualitative…
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Taxonomy
TopicsAdvanced X-ray Imaging Techniques · Integrated Circuits and Semiconductor Failure Analysis · Advanced Electron Microscopy Techniques and Applications
