# Non-volatile photonic-electronic memory via 3D monolithic ferroelectric-silicon ring resonator

**Authors:** Hang Chen

PMC · DOI: 10.1038/s41377-024-01625-9 · 2024-09-26

## TL;DR

This paper introduces a new type of memory that combines photonic and electronic components using a 3D structure with ferroelectric materials.

## Contribution

The novel integration of ferroelectric thin films with silicon photonic platforms enables electrically and optically programmable non-volatile memory.

## Key findings

- The memory supports electrically and optically programmable operations.
- It allows non-destructive reading and multi-level data storage.
- The fabrication process is compatible with both electronic and photonic systems.

## Abstract

A novel non-volatile photonic-electronic memory, 3D integrating an Al-doped HfO2 ferroelectric thin film onto a silicon photonic platform using fully compatible electronic and photonic fabrication processes, enables electrically/optically programmable, non-destructively readable, and multi-level storage functions.

## Full-text entities

- **Chemicals:** HfO2 (-), Al (MESH:D000535), silicon (MESH:D012825)

## Figures

1 figure with captions in the complete paper: https://tomesphere.com/paper/PMC11427707/full.md

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Source: https://tomesphere.com/paper/PMC11427707