Beyond two dimensions: Exploring 3D dielectrophoresis for microparticle control using carbon electrodes
Oscar Pilloni, Marc Madou, Laura Oropeza-Ramos

TL;DR
This paper introduces a 3D dielectrophoresis platform using carbon electrodes for precise microparticle control in microvolumes.
Contribution
The novel contribution is the development of a 3D microparticle manipulation system using carbon-based microelectrodes for high-throughput control.
Findings
The platform enables precise 3D positioning of microparticles using dielectrophoresis forces.
It allows simultaneous manipulation of multiple microparticles and individual directional displacement.
The system is fabricated using C-MEMS technology and is suitable for industrial batch production.
Abstract
This study explores the frontiers of microparticle manipulation by introducing an actuator platform for the three-dimensional positioning of microparticles using dielectrophoresis (DEP), a technique known for its selectivity and ease of integration with microtechnology. Leveraging advancements in carbon-based devices due to their biocompatibility and electrochemical stability, our work extends the application of DEP from two-dimensional constraints to precise 3D positioning within microvolumes, employing a photolithography-based fabrication process known as Carbon-MEMS technology (C-MEMS). We present the design, finite element simulation, fabrication, and testing of this platform, which utilizes a unique combination of planar and 3D carbon microelectrodes individually addressable on a transparent substrate. This setup enables the application of DEP forces, allowing for high-throughput…
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Taxonomy
TopicsMicrofluidic and Bio-sensing Technologies · Electrowetting and Microfluidic Technologies · Microfluidic and Capillary Electrophoresis Applications
