Integration of Sm2Co17 Micromagnets in a Ferromagnetic Multipolar Microrotor to Enhance MEMS and Micromotor Performance
Efren Diez-Jimenez, Alberto Bollero, Ignacio Valiente-Blanco, Ester M. Palmero, Miguel Fernandez-Munoz, Diego Lopez-Pascual, Gabriel Villalba-Alumbreros
TL;DR
A new method to integrate multiple Sm2Co17 micromagnets in a microrotor improves the performance of MEMS and micromotors.
Contribution
A novel microassembly process for integrating multiple Sm2Co17 micromagnets in a ferromagnetic core is introduced.
Findings
A multipolar microrotor with 11 magnetic dipoles was successfully fabricated using Sm2Co17 micromagnets.
Magnetic measurements aligned well with simulations, indicating no degradation during manufacturing.
The method allows for enhanced design possibilities in micromotor and MEMS performance.
Abstract
MEMS and micromotors may benefit from the increasing complexity of rotors by integrating a larger number of magnetic dipoles. In this article, a new microassembly and bonding process to integrate multiple Sm2Co17 micromagnets in a ferromagnetic core is presented. We experimentally demonstrate the feasibility of a multipolar micrometric magnetic rotor with 11 magnetic dipoles made of N35 Sm2Co17 micromagnets (length below 250 μm and thickness of 65 μm), integrated on a ferromagnetic core. We explain the micromanufacturing methods and the multistep microassembly process. The core is manufactured on ferromagnetic alloy Fe49Co49V2 and has an external diameter of 800 μm and a thickness of 200 μm. Magnetic and geometric measurements show good geometric fitting and planarity. The manufactured microrotor also shows good agreement among the magnetic measurements and the magnetic simulations…
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Taxonomy
TopicsReligious and Theological Studies