# Highly Selective Tilted Triangular Springs with Constant Force Reaction

## TL;DR

This paper introduces a new type of spring for MEMS that maintains a constant force while being highly selective in its movement.

## Contribution

The novelty lies in the design of triangular springs with a preset tilting angle that enables constant force reaction.

## Key findings

- Tilted triangular springs demonstrate constant force reactions over a large deflection range.
- The tilting angle significantly affects spring stiffness and selectivity.
- Experimental validation shows successful implementation in a comb-drive actuator.

## Abstract

Guiding mechanisms are among the most elementary components of MEMS. Usually, a spring is required to be compliant in only one direction and stiff in all other directions. We introduce triangular springs with a preset tilting angle. The tilting angle lowers the reaction force and implements a constant reaction force. We show the influence of the tilting angle on the reaction force, on the spring stiffness and spring selectivity. Furthermore, we investigate the influence of the different spring geometry parameters on the spring reaction force. We experimentally show tilted triangular springs exhibiting constant force reactions in a large deflection range and a comb-drive actuator guided by tilted triangular springs.