Generalized Phase Diagrams for Graphene CVD growth on Copper
Tongtong Wang, Ke Jin, Yishi Zhang, Dajun Shu

TL;DR
This paper develops an advanced phase diagram model for graphene CVD growth on copper, incorporating substrate strain and chemical desorption effects to better predict bilayer graphene formation.
Contribution
It introduces a generalized phase diagram framework that includes substrate strain and chemical desorption, enhancing predictive control over graphene layer growth.
Findings
Tensile strain expands the bilayer graphene growth window.
Chemical desorption suppresses bilayer graphene in high-growth regimes.
The model links microscopic mechanisms to macroscopic growth parameters.
Abstract
Understanding the competition between first-layer lateral expansion and second-layer nucleation is essential for layer-controlled graphene growth via chemical vapor deposition (CVD). Building on our previous phase diagram framework based on the dimensionless parameters and , we develop an enhanced model incorporating two previously neglected effects: thermal-expansion-induced substrate strain and chemical desorption of carbon monomers via reverse dehydrogenation. First-principles calculations are employed to determine the strain-dependent diffusion and attachment barriers on both exposed and graphene-covered Cu(111) surfaces. By mapping the multi-step CVD process into an effective quasi-physical vapor deposition, we construct a generalized phase diagram characterized by the coupled effects of , , and a newly introduced desorption parameter . Our…
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