Nullspace-based Fault Diagnosis for Closed-Loop Mechatronic Systems with Application to Semiconductor Equipment

TL;DR

This paper develops nullspace-based fault diagnosis methods tailored for closed-loop mechatronic systems and demonstrates their effectiveness on a semiconductor wafer stage through real experiments.

Contribution

It extends nullspace-based FDI synthesis conditions to closed-loop linear systems in mechatronics, with practical validation on a large-scale wafer stage.

Findings

Successful application of FDI methods on a wafer stage prototype.

Real experiments confirm the effectiveness of the proposed approach.

Applicable to a wide range of production machines and scientific instruments.

Abstract

Fault detection and isolation (FDI) systems are critical for modern mechatronic production equipment, as their continuous operation is heavily dependent on the ability to detect and isolate faults in a timely and efficient manner. The aim of this paper is to address closed-loop aspects for linear systems and enable the application of well-known nullspace-based FDI synthesis conditions to mechatronic systems subject to actuator and sensor faults. These tailored FDI synthesis conditions are applied to a large-scale prototype wafer stage, showcasing the proposed approach through real experiments, thereby underlining the usefulness of the derived synthesis conditions for a wide range of production machines and scientific instruments.