Capacitive Pixelated CMOS Electronic Nose
M. A. Basyooni-M. Kabatas, Tao Shen, Kai Betlem, Chunyu Huang, Monique A. van der Veen, Frans Widdershoven, Murali K. Ghatkesar, Peter G. Steeneken

TL;DR
This paper introduces a low-cost, CMOS-based electronic nose with 1024 capacitive microelectrodes functionalized by inkjet printing, capable of detecting and distinguishing VOCs with high sensitivity and low cross-sensitivity to humidity.
Contribution
It presents a novel capacitive CMOS E-nose with large pixel array, functionalization via inkjet printing, and demonstrated ability to detect specific VOCs under humid conditions.
Findings
Reproducible responses to binary VOC mixtures.
High response to 2-butanone and toluene.
Low cross-sensitivity to water vapor.
Abstract
Although some of the human senses can nowadays be replaced by low-cost electronic sensors such as microphones and image sensors, a compact low-cost electronic nose (E-nose) remains elusive. In this work, an E-nose is presented that can capacitively detect volatile organic compounds (VOCs). The E-nose consists of an array of 1024 capacitive microelectrodes on a complementary metal-oxide-semiconductor (CMOS) chip, functionalized by inkjet printing. The pixels are coated with a UV-curable ink and metal-organic frameworks (MOFs: ZIF-8, MIL-101(Cr), MIL-140A) to create chemically diverse microdomains that generate gas-specific response patterns through adsorption-driven dielectric loading. ZIF-8 exhibits the highest response to 2-butanone, whereas the UV-curable layer responds most strongly to toluene; both show low cross-sensitivity to water vapor, enabling operation under humid conditions.…
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Taxonomy
TopicsGas Sensing Nanomaterials and Sensors · Advanced Chemical Sensor Technologies · Analytical Chemistry and Sensors
