High-Bandwidth 940 nm VCSEL with Zn-diffusion for Optical Communications

TL;DR

This paper introduces a systematic design approach combining simulation and experimental validation to develop high-speed 940 nm VCSELs with Zn-diffusion, achieving over 34 GHz bandwidth and enabling 100 Gbit/s data transmission for optical communications.

Contribution

The paper presents a novel integrated design methodology for VCSELs that combines simulation and fabrication, including Zn-diffusion, to optimize high-speed performance.

Findings

Achieved a 34 GHz modulation bandwidth in fabricated VCSELs.

Validated simulation predictions with experimental results.

Demonstrated 100 Gbit/s PAM-4 data transmission capability.

Abstract

We present a systematic design methodology, combining simulation and experimental validation, for high-speed 940 nm vertical-cavity surface-emitting lasers (VCSELs). A comprehensive simulation study was conducted to optimize the device structure, focusing on the number of oxide layers and the aperture size, which predicted a maximum modulation bandwidth of over 35 GHz. To validate this approach, an optimized device with a 4-{\mu}m double-oxide aperture was fabricated and characterized. Crucially, during the fabrication process, a Zn-diffused region was incorporated to further enhance device performance. The experimental results demonstrate a modulation bandwidth of 34 GHz and successful 100 Gbit/s PAM-4 data transmission. The excellent agreement between the simulated and measured performance validates the effectiveness of our design meth-odology, providing a reliable framework for developing next-generation optical inter-connects.