Integrating Domain-Specialized Language Models with AI Measurement Tools for Deterministic Atomic-Resolution Experimentation
Zhuo Diao, Kouma Matsumoto, Linfeng Hou, Masahiro Ohara, Hayato Yamashita, Masayuki Abe

TL;DR
This paper presents a domain-specific language model framework for autonomous control of scanning probe microscopy, enabling real-time atomic-resolution experiments with high accuracy and deterministic execution on consumer hardware.
Contribution
It introduces a specialized, modular architecture that combines small language models with AI measurement tools for deterministic scientific experimentation.
Findings
Achieved real-time atomic-resolution SPM experiments at room temperature.
Reduced perplexity from 1.44 to 1.20, improving model reliability.
Model reached 99.3% and 95.2% command accuracy, outperforming OpenAI o4-mini.
Abstract
Self-driving laboratories based on large language models promise to transform scientific discovery through general experimental automation. However, realizing this vision on precision platforms remains challenging, requiring deterministic execution and effective domain adaptation under strict physical constraints. We address these requirements through a framework that specializes in small language models for autonomous control of scanning probe microscopy, coordinating task-specific models with AI-driven measurement tools. We demonstrate real-time, atomic-resolution SPM experiments at room temperature, achieving instruction-level control and multi-step experimental planning. Fine-tuning reduces perplexity from 1.44 to 1.20 and improves reliability, with the adapted model reaching 99.3% and 95.2% command accuracy, outperforming OpenAI o4-mini on domain-specific tasks. This architecture…
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